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MIKASA Mask Aligner
■Manual contact mask aligners.
■Can handle silicon, glass, chemical compound, film, and various other materials as well as irregularly-sized substrates.
■Three types of exposure sources—collimator, multi-mirror, and integrator—are available to suit your budget and applications.
■Models are available that can handle substrates 5 × 5 mm to 100 × 100 mm in size and up to 6 inches in diameter.
■Easily replaceable mask holders and sample stages make the aligners ideal for research and development.
■Objective lenses for the alignment scope come in two magnifications (10× 20×) for accurate alignment, coating thickness measurement, and other applications.
측정,분석장치
반도체 장치
실험실 설비/재료
ma-20_SU-8
MA-20_SEM_ATSU_s
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ma-20_SU-8
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